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Alcatel Micro Machining Systems

Alcatel Micro Machining Systems (AMMS) was a French manufacturer of Deep Reactive Ion Etching systems. The company's headquarters were located in Annecy, France.2 Wikipedia text CC BY-SA 4.0

Last updated Oct 21, 2026.

Overview

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Alcatel Micro Machining Systems (AMMS) was a French manufacturer of Deep Reactive Ion Etching systems. The company's headquarters were located in Annecy, France.2

The story

Alcatel Vacuum Technology, AMMS' original parent company, had a long-running business in plasma processing. Its first equipment based on an Alcatel patented Inductive Coupled Plasma (ICP) source, with independent source power and substrate bias control for deep etching of silicon, was launched in 1993. AMMS was created as a subsidiary in 2006 to focus on silicon etching.

Alcatel Micro Machining Systems operated until 2008, when it was sold to the Tegal Company. In 2011 SPTS acquired Tegal's DRIE assets (formerly AMMS). The deal included the transfer to SPTS of the capital stock and operations of Tegal France SAS, a wholly owned Tegal subsidiary.

From Wikipedia’s article on Alcatel Micro Machining Systems, shared under CC BY-SA 4.0.3

Products and brands

The company previously manufactured DRIE systems including:

Notching free

Profile control

Dry release

Read the full text

Patented Sharp process: Super High Aspect Ratio

Tapered via

High etch rate

V shape

Cryo process

Through the wafer

High etch rate and low roughness

High aspect ratio for 3D

Fused Silica etching

Low smoothness

High aspect ratio holes

From Wikipedia’s article on Alcatel Micro Machining Systems, shared under CC BY-SA 4.0.3

Sources

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