Elmos Semiconductor

1984 - Founded in Dortmund, Germany

1985 - 32 employees, 0.4 M DM turnover, Installation of 4" Wafer Fab in Dortmund

1994 - DIN ISO 9001 certificate

1998 - 460 employees, 140 M DM turnover. Complete supply from new 6" line

1999 - IPO to new market, Frankfurt

2001 - 630 employees, 107 million Euro turnover Acquisition of Eurasem (Packaging, NL) and SMI (MEMS, USA)

2002 - TS16949

2005 - Opened 8" wafer fab in Duisburg as second production line

Silicon Microstructures, Inc.(SMI) was founded in 1991 as a commercial source of high-performance silicon pressure sensors, including Microelectromechanical systems sensors, and accelerometers. Its first product was a silicon sensor for very low-pressure usage.

Elmos Semiconductor acquired SMI in March 2001 from OSI Systems.

SMI began production on higher performance, system level sensors and microstructures, wireless, RF and bus addressable microstructures.

In August 2002, SMI acquired the IC Sensors' wafer fabrication operations and wafer R&D group and relocated to Milpitas, California. The following year, Silicon Microstructures undertook a significant and complete wafer fabrication upgrade to expand the facility for full 6" wafer handling. This facility processed primarily 6 inch wafers and has advanced technical capabilities including deep reactive ion etching (DRIE) and plasma enhanced fusion bonding.