Private company
MKS Instruments
Logo: MKS Instruments, Public domain, via Wikimedia Commons3
American technology company
MKS Inc. is a technology company that supplies instruments, subsystems, systems, process control technologies, and specialty chemical products used in manufacturing semiconductor chips, printed circuit board, advanced packaging (semiconductor), and specialty industrial applications.2 Wikipedia text CC BY-SA 4.0
Last updated Oct 21, 2026.
Overview
- HeadquartersAndover1
- Websitewww.mks.com
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MKS Inc. is a technology company that supplies instruments, subsystems, systems, process control technologies, and specialty chemical products used in manufacturing semiconductor chips, printed circuit board, advanced packaging (semiconductor), and specialty industrial applications.2
Corporate structure
MKS Instruments sits at the top of its group. 6 entities, 4 countries on record. Switch between the flow chart and the network, and select any entity to see its details.
- MKS Instruments Andover
- Atotech Subsidiary · Berlin
- Atotech (Slovenia) Subsidiary · Slovenia
- Atotech (United States) Subsidiary · United States
- MKS Instruments (Germany) Subsidiary · Munich, Germany
- MKS Japan, Inc. Subsidiary · Tokyo, Japan
- Atotech Subsidiary · Berlin
Built from subsidiaries, stakes and holdings from Wikidata (CC0); major holders from Schedules 13D and 13G. Each entity in the chart links to its source.
Subsidiaries and ownership
Subsidiaries
From Wikidata.1
Links
- Websitewww.mks.com1
- WikipediaMKS Instruments
- WikidataQ30283915
Sources
The numbers on this page point here. Each one links to the record it came from.
- 1WikidataMKS Instruments on Wikidata
- 2WikipediaMKS Instruments on Wikipedia
- 3Wikimedia CommonsMKS Instruments logo by MKS Instruments, Public domain