ACLS on Nasdaq
Axcelis Technologies
Logo: Axcelis Technologies, Public domain, via Wikimedia Commons5
American semiconductor equipment manufacturer
Axcelis Technologies, Inc. is an American company engaging in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. It produces ion implantation systems, including high and medium current implanters, and high energy implanters, and curing systems used in the fabrication of semiconductor chips. The company was incorporated in 1995 and is headquartered in Beverly, Massachusetts, United States.3 Its shares trade on Nasdaq under the symbol ACLS.1 Wikipedia text CC BY-SA 4.0
Price unavailable
Last updated Oct 21, 2026.
Overview
Compare with ACM Research, Inc., Cricut or Veeco, or pick any stock.
- TickerACLS on Nasdaq1
- IndustrySpecial Industry Machinery, NEC1
- HeadquartersBeverly1
- Websitewww.axcelis.com
- Legal formDelaware corporation1
- Incorporated inDE6
- Business address108 Cherry Hill Drive, Beverly, Ma 019156
- Filer categoryLarge accelerated filer6
- LEI529900HF9B6NL1QG9F054
- StatusActive4
- LEI statusIssued and current4
- Registered addressC/O THE CORPORATION TRUST COMPANY, 19801 Wilmington, United States4
- Registered withDivision of Corporations, Department of State, 25714794
See how the biggest companies compare on our leaderboards

Axcelis Technologies, Inc. is an American company engaging in the design, manufacture, and servicing of capital equipment for the semiconductor manufacturing industry worldwide. It produces ion implantation systems, including high and medium current implanters, and high energy implanters, and curing systems used in the fabrication of semiconductor chips. The company was incorporated in 1995 and is headquartered in Beverly, Massachusetts, United States.3
Financials
From the company’s reports to the SEC. Every number links to the filing it came from.
Key numbers, fiscal 2025
What sells
Revenue by product, business segment and region, as the company reports it to the SEC.
Products and services
Ion implantation systems and services brought in 49% of the revenue Axcelis Technologies broke down this way in fiscal 2025.
Products and services by year
| Products and services | 2023 | 2024 | 2025 |
|---|---|---|---|
| Ion implantation systems and services | $1.1B | $1.0B | $824.1M |
| Systems | $883.6M | $782.6M | $571.0M |
| Aftermarket | $247.0M | $235.3M | $268.0M |
| Other systems and services | $19.3M | $16.8M | $14.9M |
Regions
Asia Pacific brought in 46% of the revenue Axcelis Technologies broke down this way in fiscal 2025.
Regions by year
| Regions | 2023 | 2024 | 2025 |
|---|---|---|---|
| Asia Pacific | $811.3M | $781.0M | $610.2M |
| United States | $749.3M | $632.0M | $482.6M |
| North America | $174.8M | $144.1M | $137.1M |
| Europe | $144.5M | $92.8M | $91.8M |
Where the money goes
Where each dollar of revenue went, fiscal 2025
- Cost of revenue55¢$462.2M
- Research and development13¢$109.0M
- Other costs15¢$129.6M
- Income tax2¢$18.0M
- Profit14¢$120.2M
Out of $839.0M in revenue.9
Where each dollar of operating cash went, fiscal 2025
- Capital spending9¢$11.3M
- Share buybacks91¢$121.1M
Out of $118.3M of cash from operations. Spending exceeded cash from operations; the rest came from savings or borrowing.9
Financial statements
Every line of the income statement as filed: the last 3 fiscal years, latest first.9
| Period ending | 2025-12-31 | 2024-12-31 | 2023-12-31 |
|---|---|---|---|
| Total revenue | $839.0M | $1.0B | $1.1B |
| Total cost of revenue | $462.2M | $563.2M | $639.3M |
| Gross profit | $376.8M | $454.7M | $491.3M |
| Research and development | $109.0M | $105.5M | $96.9M |
| Sales and marketing | $65.4M | $68.0M | $62.8M |
| General and administrative | $83.2M | $70.3M | $65.8M |
| Total operating expenses | $257.5M | $243.9M | $225.5M |
| Income from operations | $119.3M | $210.8M | $265.8M |
| Interest income | $21.5M | $24.4M | $18.2M |
| Interest expense | -$5.4M | -$5.5M | -$5.3M |
| Other, net | $2.8M | $539.0K | -$48.0K |
| Total other income | $18.9M | $19.5M | $12.8M |
| Income before income taxes | $138.2M | $230.3M | $278.6M |
| Income tax provision | $18.0M | $29.3M | $32.3M |
| Net income | $120.2M | $201.0M | $246.3M |
| Basic | $3.81 | $6.17 | $7.52 |
| Diluted | $3.80 | $6.15 | $7.43 |
| Basic weighted average shares of common stock | 31.6M shares | 32.6M shares | 32.8M shares |
| Diluted weighted average shares of common stock | 31.7M shares | 32.7M shares | 33.2M shares |
No quarter-by-quarter statement was filed.
Every line of the balance sheet as filed: the last 4 fiscal years (annual) or 4 quarters (quarterly), latest first.9
| Period ending | 2025-12-31 | 2024-12-31 | 2023-12-31 | 2022-12-31 |
|---|---|---|---|---|
| Cash and cash equivalents | $145.5M | $123.5M | ||
| Short-term investments | $228.8M | $447.8M | ||
| Accounts receivable, net | $168.5M | $203.1M | ||
| Inventories, net | $329.0M | $282.2M | ||
| Prepaid income taxes | $4.7M | $6.4M | ||
| Prepaid expenses and other current assets | $66.8M | $60.5M | ||
| Total current assets | $943.2M | $1.1B | ||
| Property, plant and equipment, net | $56.1M | $53.8M | ||
| Operating lease assets | $28.9M | $29.6M | ||
| Finance lease assets, net | $14.2M | $15.3M | ||
| Long-term restricted cash | $10.6M | $7.6M | ||
| Deferred income taxes | $79.9M | $68.3M | ||
| Long-term investments | $182.4M | |||
| Other assets | $46.0M | $50.6M | ||
| Total assets | $1.4B | $1.3B | ||
| Accounts payable | $42.3M | $46.9M | ||
| Accrued compensation | $34.2M | $25.5M | ||
| Warranty | $9.5M | $13.0M | $14.1M | |
| Income taxes | $11.4M | |||
| Deferred revenue | $65.5M | $94.7M | ||
| Current portion of finance lease obligation | $1.6M | $1.3M | ||
| Other current liabilities | $33.1M | $26.0M | ||
| Total current liabilities | $197.7M | $207.5M | ||
| Long-term finance lease obligation | $40.8M | $42.3M | ||
| Long-term deferred revenue | $43.4M | $43.5M | ||
| Other long-term liabilities | $44.8M | $42.6M | ||
| Total liabilities | $326.7M | $336.0M | ||
| Common stock, $0.001 par value, 75,000 shares authorized; 30,717 shares issued and outstanding at December 31, 2025; 32,365 shares issued and outstanding at December 31, 2024 | $31.0K | $32.0K | ||
| Additional paid-in capital | $533.3M | $548.7M | ||
| Retained earnings | $503.5M | $470.3M | ||
| Accumulated other comprehensive loss | -$2.2M | -$6.2M | ||
| Total stockholders' equity | $1.0B | $1.0B | $864.9M | $667.3M |
| Total liabilities and stockholders' equity | $1.4B | $1.3B | ||
| Common stock, par value (in dollars per share) | $0.00 | $0.00 | ||
| Common stock, shares authorized | 75.0M shares | 75.0M shares | ||
| Common stock, shares issued | 30.7M shares | 32.4M shares | ||
| Common stock, shares outstanding | 30.7M shares | 32.4M shares |
| Period ending | 2025-12-31 | 2024-12-31 | 2023-12-31 | 2022-12-31 |
|---|---|---|---|---|
| Cash and cash equivalents | $145.5M | $123.5M | ||
| Short-term investments | $228.8M | $447.8M | ||
| Accounts receivable, net | $168.5M | $203.1M | ||
| Inventories, net | $329.0M | $282.2M | ||
| Prepaid income taxes | $4.7M | $6.4M | ||
| Prepaid expenses and other current assets | $66.8M | $60.5M | ||
| Total current assets | $943.2M | $1.1B | ||
| Property, plant and equipment, net | $56.1M | $53.8M | ||
| Operating lease assets | $28.9M | $29.6M | ||
| Finance lease assets, net | $14.2M | $15.3M | ||
| Long-term restricted cash | $10.6M | $7.6M | ||
| Deferred income taxes | $79.9M | $68.3M | ||
| Long-term investments | $182.4M | |||
| Other assets | $46.0M | $50.6M | ||
| Total assets | $1.4B | $1.3B | ||
| Accounts payable | $42.3M | $46.9M | ||
| Accrued compensation | $34.2M | $25.5M | ||
| Warranty | $9.5M | $13.0M | $14.1M | |
| Income taxes | $11.4M | |||
| Deferred revenue | $65.5M | $94.7M | ||
| Current portion of finance lease obligation | $1.6M | $1.3M | ||
| Other current liabilities | $33.1M | $26.0M | ||
| Total current liabilities | $197.7M | $207.5M | ||
| Long-term finance lease obligation | $40.8M | $42.3M | ||
| Long-term deferred revenue | $43.4M | $43.5M | ||
| Other long-term liabilities | $44.8M | $42.6M | ||
| Total liabilities | $326.7M | $336.0M | ||
| Common stock, $0.001 par value, 75,000 shares authorized; 30,717 shares issued and outstanding at December 31, 2025; 32,365 shares issued and outstanding at December 31, 2024 | $31.0K | $32.0K | ||
| Additional paid-in capital | $533.3M | $548.7M | ||
| Retained earnings | $503.5M | $470.3M | ||
| Accumulated other comprehensive loss | -$2.2M | -$6.2M | ||
| Total stockholders' equity | $1.0B | $1.0B | $864.9M | $667.3M |
| Total liabilities and stockholders' equity | $1.4B | $1.3B | ||
| Common stock, par value (in dollars per share) | $0.00 | $0.00 | ||
| Common stock, shares authorized | 75.0M shares | 75.0M shares | ||
| Common stock, shares issued | 30.7M shares | 32.4M shares | ||
| Common stock, shares outstanding | 30.7M shares | 32.4M shares |
Cash flow is reported year to date, not quarter by quarter, so there are no separate quarterly figures.
Every line of the cash flow as filed: the last 3 fiscal years, latest first.9
| Period ending | 2025-12-31 | 2024-12-31 | 2023-12-31 |
|---|---|---|---|
| Net income | $120.2M | $201.0M | $246.3M |
| Depreciation and amortization | $17.6M | $15.8M | $13.1M |
| Deferred income taxes | -$10.7M | -$15.6M | -$20.0M |
| Stock-based compensation expense | $20.8M | $21.0M | $18.3M |
| Provision for doubtful accounts | $3.0M | $1.1M | |
| Provision for excess and obsolete inventory | $3.9M | $6.0M | $5.2M |
| Accretion of discounts and premiums on short-term and long-term investments | -$4.2M | -$12.4M | -$12.1M |
| Unrealized currency gain on foreign denominated transactions | $1.9M | $7.8M | $2.3M |
| Mark-to-market adjustment on forward exchange contracts | -$435.0K | -$267.0K | |
| Accounts receivable | $37.4M | $6.9M | -$50.8M |
| Inventories | -$42.2M | $5.9M | -$70.0M |
| Prepaid expenses and other current assets | -$5.2M | -$11.7M | -$16.0M |
| Accounts payable and other current liabilities | $6.2M | -$413.0K | -$8.1M |
| Deferred revenue | -$29.7M | -$71.1M | $56.2M |
| Income taxes | $13.1M | -$9.0M | $3.8M |
| Other assets and liabilities | -$10.5M | -$6.0M | -$12.3M |
| Net cash provided by operating activities | $118.3M | $140.8M | $156.9M |
| Expenditures for property, plant and equipment and capitalized software | -$11.3M | -$12.2M | -$20.7M |
| Purchases of short-term and long-term investments | -$646.0M | -$539.1M | -$388.8M |
| Maturities and sales of short-term investments | $687.2M | $442.6M | $308.6M |
| Net cash provided by (used in) investing activities | $29.9M | -$108.7M | -$100.9M |
| Net settlement on restricted stock grants | -$4.5M | -$11.6M | -$16.6M |
| Repurchase of common stock | -$121.1M | -$60.5M | -$52.5M |
| Proceeds from Employee Stock Purchase Plan purchases | $2.5M | $2.4M | $2.1M |
| Principal payments on finance lease obligation | -$1.4M | -$1.5M | -$1.2M |
| Proceeds from exercise of stock options | $25.0K | ||
| Net cash used in financing activities | -$124.5M | -$71.2M | -$68.3M |
| Effect of exchange rate changes on cash and cash equivalents | $1.3M | -$3.8M | -$139.0K |
| Net increase (decrease) in cash, cash equivalents and restricted cash | $25.0M | -$42.9M | -$12.4M |
| Interest | $4.6M | $4.7M | $4.9M |
No quarter-by-quarter statement was filed.
Corporate structure
Axcelis Technologies sits at the top of its group. 1 entity, 1 country on record. Switch between the flow chart and the network, and select any entity to see its details.
Major holders of Axcelis Technologies
- FMR LLC Filed SCHEDULE 13G/A on Axcelis Technologies, latest Aug 6, 2026 (3 filings since May 6, 2026)
- REINHART PARTNERS, LLC. Filed SCHEDULE 13G/A on Axcelis Technologies, latest Jul 14, 2026 (2 filings since Feb 12, 2026)
- VANGUARD CAPITAL MANAGEMENT LLC Filed SCHEDULE 13G on Axcelis Technologies, latest Apr 29, 2026
- VANGUARD PORTFOLIO MANAGEMENT LLC Filed SCHEDULE 13G on Axcelis Technologies, latest Apr 28, 2026
- VANGUARD GROUP INC Filed SCHEDULE 13G/A on Axcelis Technologies, latest Mar 26, 2026 (6 filings since Feb 9, 2022)
- AMERICAN CENTURY INVESTMENT MANAGEMENT INC Filed SCHEDULE 13G/A on Axcelis Technologies, latest Nov 14, 2025 (2 filings since Aug 14, 2025)
- BlackRock Filed SCHEDULE 13G/A on Axcelis Technologies, latest Apr 29, 2025 (7 filings since Jan 28, 2022)
- Senvest Management, LLC Filed SC 13G/A on Axcelis Technologies, latest Feb 9, 2024 (4 filings since Feb 9, 2022)
- PRIMECAP MANAGEMENT CO/CA/ Filed SC 13G/A on Axcelis Technologies, latest Oct 7, 2022 (2 filings since Feb 10, 2022)
- DIMENSIONAL FUND ADVISORS LP Filed SC 13G/A on Axcelis Technologies, latest Feb 8, 2022
- Axcelis Technologies Beverly, Massachusetts, United States
Built from parent and subsidiary links from GLEIF, the Global Legal Entity Identifier Foundation (CC0); subsidiaries listed in Exhibit 21 of annual reports filed with the SEC; major holders from Schedules 13D and 13G. Each entity in the chart links to its source.
What it owns
What Axcelis Technologies reports owning in its annual reports to the SEC: buildings, land and equipment, real estate and locations, investments, intangible assets and inventory, at the end of its latest fiscal year and a year before.
Property and equipment
| Item | Latest | A year before | Change |
|---|---|---|---|
| Property and equipment, before depreciation | $93.4M9 Dec 31, 2025 | $84.9M9 Dec 31, 2024 | +10.0% |
| Accumulated depreciation | $37.2M9 Dec 31, 2025 | $31.1M9 Dec 31, 2024 | +19.7% |
| Property and equipment, net | $56.1M9 Dec 31, 2025 | $53.8M9 Dec 31, 2024 | +4.4% |
| Finance-lease assets | $14.2M9 Dec 31, 2025 | $15.3M9 Dec 31, 2024 | −7.8% |
| Operating-lease assets (leased space) | $28.9M9 Dec 31, 2025 | $29.6M9 Dec 31, 2024 | −2.3% |
Investments
| Item | Latest | A year before | Change |
|---|---|---|---|
| Cash and cash equivalents | $145.5M9 Dec 31, 2025 | $123.5M9 Dec 31, 2024 | +17.8% |
| Marketable securities, current | $228.8M9 Dec 31, 2025 | $447.8M9 Dec 31, 2024 | −48.9% |
| Marketable securities, non-current | $182.4M9 Dec 31, 2025 |
Inventory
| Item | Latest | A year before | Change |
|---|---|---|---|
| Inventory, total | $329.0M9 Dec 31, 2025 | $282.2M9 Dec 31, 2024 | +16.6% |
| Raw materials | $259.0M9 Dec 31, 2025 | $227.1M9 Dec 31, 2024 | +14.0% |
| Work in process | $51.8M9 Dec 31, 2025 | $34.5M9 Dec 31, 2024 | +50.1% |
| Finished goods | $18.2M9 Dec 31, 2025 | $20.6M9 Dec 31, 2024 | −11.6% |
Properties, in its own words
We lease our principal facility in Beverly, Massachusetts, which comprises 417,000 square feet. The facility is used for manufacturing, research and development, sales/marketing, customer support, advanced process development, product demonstration, customer-training center and corporate headquarters. We also lease our Axcelis Logistics Center, a state-of-the-art logistics and flex manufacturing center with 101,800 square feet built to our specifications, in Beverly, Massachusetts and our Axcelis Asia Operations Center in South Korea, which comprises 38,000 square feet and is principally used for manufacturing.
We believe that our manufacturing facilities and equipment generally are well maintained, in good operating condition, suitable for our purposes, and adequate for our present operations.
The rest of Item 2
We own 23 acres of undeveloped property in Beverly, Massachusetts, adjacent to our headquarters.
As of December 31, 2025, we also leased 48 other properties, of which 10 are located in the United States and the remainder are located in Asia and Europe, including offices in China, Germany, Italy, Japan, Singapore, South Korea and Taiwan. These properties are used for sales, service and warehousing.
Our Beverly, Massachusetts facility is ISO 9001:2015, ISO 14001:2015, and ISO 45001:2018 certified, our European office is ISO 9001:2015 certified, and our Asia Axcelis Operations Center is ISO 9001:2015, ISO 14001:2015 and ISO 45001:2018 certified.
Item 2 of the 10-K filed Feb 26, 2026.17
Leadership
Who has led Axcelis Technologies, and when. Pick a name to see everywhere that person has worked.
Chief executive
Chief financial officer
- Chief executive officerRussell Low May 16, 2023 to now18
- Chief executive officerMary G. Puma Jan 4, 2006 to Mar 1, 202319
- ChairMary G. Puma Jan 4, 2006 to May 13, 202419
- PresidentRussell Low May 16, 2023 to now18
- PresidentMary G. Puma Jan 4, 2006 to Mar 1, 202319
- Chief financial officerDavid Ryzhik Mar 24, 2026 to now20
- Chief financial officerJames Gordon Coogan Sep 29, 2023 to Mar 24, 202621
- Chief financial officerKevin J. Brewer Jul 17, 2014 to Jan 2, 202422
- Chief financial officerJay Zager Jan 18, 2011 to Jan 22, 201323
- Chief financial officerStephen G. Bassett Jul 5, 2006 to Nov 12, 201024
Board members and other officers (38)
- VP Corporate ControllerTodd Sutton Mar 25, 2026 to now25
- EVP Global OperationsRobert John Mahoney Dec 22, 2025 to now26
- EVP, EngineeringGerald M. Blumenstock Jun 12, 2023 to now27
- EVP Global Customer OperationsChristopher Tatnall Sep 1, 2023 to now28
- EVP Marketing and ApplicationsGreg Redinbo Sep 6, 2022 to now29
- EVP, EngineeringRussell Low Nov 15, 2016 to Mar 1, 202330
- EVP, Customer OperationsJohn E. Aldeborgh Feb 13, 2013 to Feb 18, 202131
- EVP, Corporate Mktg & StrategyDouglas A. Lawson Nov 14, 2013 to Jun 24, 202432
- Senior VP, MarketingWilliam J. Bintz Sep 17, 2007 to Nov 23, 202233
- Senior VP and CIOCraig M. Halterman Jan 4, 2006 to Jan 6, 200934
- SVP, Manufacturing OperationsKevin J. Brewer Jan 4, 2006 to Jan 29, 201435
- Executive VP, HR/LegalLynnette C. Fallon Jan 4, 2006 to Jan 7, 202536
- Senior Vice President, FinanceDonald W. Palette Jul 5, 2006 to Dec 14, 200737
- Sr VP Product DevelopmentMarc S. Levine Jul 5, 2006 to Dec 14, 200738
- Senior VP MarketingMark J. Namaroff Jul 5, 2006 to Dec 14, 200739
- SVP, Customer OperationsMatthew P. Flynn Jul 5, 2006 to Feb 14, 201240
- Board memberGregory B. Graves Feb 28, 2024 to now41
- Board memberNecip Sayiner Feb 28, 2024 to now42
- Board memberRussell Low May 16, 2023 to now18
- Board memberDipti Vachani Feb 23, 2022 to May 16, 202443
- Board memberJeanne Quirk Feb 23, 2022 to now44
- Board memberJorge Titinger Aug 15, 2019 to now45
- Board memberTzu Yin Chiu May 16, 2018 to now46
- Board memberMary G. Puma May 17, 2016 to Mar 1, 202347
- Board memberDennis Thomas St May 13, 2015 to now48
- Board memberJohn T. Kurtzweil May 13, 2015 to now49
- Board memberRichard J. Faubert May 13, 2015 to Aug 12, 202250
- Board memberArthur L. George Jr. May 14, 2014 to May 17, 202151
- Board memberBarbara J. Lundberg May 14, 2014 to Dec 13, 201652
- Board memberEdward H. Braun Feb 3, 2011 to Jul 17, 201253
- Board memberJoseph P. Keithley Aug 4, 2011 to Dec 14, 202354
- Board memberKirk P. Pond Feb 3, 2006 to Feb 14, 200655
- Board memberMichio Naruto Jul 5, 2006 to Jul 18, 200756
- Board memberPatrick H. Nettles Jul 5, 2006 to May 17, 201757
- Board memberR. John Fletcher Jul 5, 2006 to Feb 17, 202158
- Board memberStephen R. Hardis Jul 5, 2006 to Jul 17, 201459
- Board memberWilliam C. Jennings Jul 5, 2006 to Jul 17, 201460
- General counselEileen Evans Dec 12, 2024 to now61
Subsidiaries and ownership
Subsidiaries (Exhibit 21)
- Axcelis Technologies GmbH Germany7
- Axcelis Technologies Pte. Ltd. Singapore7
- Axcelis Technologies, KK Japan7
- Axcelis Technologies, Ltd. Taiwan7
- Axcelis Technologies, Sarl France7
- Axcelis Technologies, Srl Italy7
The subsidiaries the company lists in Exhibit 21 of its annual report, as filed.
Timeline
- Aug 6, 20268-K Results of operations62
- May 7, 20268-K Results of operations63
- May 6, 20268-K Shareholder vote64
- Mar 12, 20268-K Executive or director change; Regulation FD disclosure65
- Feb 17, 20268-K Results of operations66
- Feb 6, 20268-K Shareholder vote; Regulation FD disclosure67
- Feb 2, 20268-K Other events68
- Jan 28, 20268-K Other events69
- Nov 4, 20258-K Results of operations70
- Oct 1, 20258-K Entered a material agreement; Other events71
- Oct 1, 20258-K Regulation FD disclosure72
- Aug 5, 20258-K Results of operations73
- May 16, 2023New chief executive Russell Low becomes CEO18
- Jan 4, 2006New chief executive Mary G. Puma becomes CEO19
- 1995Founded Founded1
Calendar
Coming up
- Nov 3, 2026Reports results for the quarter ending Sep/2026 A year earlier it reported $1.06 a share, on Nov 4, 2025.74
When it reported results
- Aug 6, 2026Reported quarterly or annual results62
- May 7, 2026Reported quarterly or annual results63
- Feb 17, 2026Reported quarterly or annual results66
- Nov 4, 2025Reported quarterly or annual results70
- Aug 5, 2025Reported quarterly or annual results73
- May 6, 2025Reported quarterly or annual results75
- Feb 10, 2025Reported quarterly or annual results76
- Nov 6, 2024Reported quarterly or annual results77
Upcoming dates from Nasdaq's calendar; past results from the company's 8-K filings (Item 2.02). The full markets calendar
Filings
455 filings to the SEC since October 2021: 6 annual reports, 15 quarterly reports, 39 major events, 273 insider forms, 29 large holders, 93 other. The latest 20:
- Sep 16, 20264 EDGAR
- Sep 16, 20264 EDGAR
- Aug 6, 202610-Q EDGAR
- Aug 6, 20268-K EDGAR
- Aug 6, 2026SCHEDULE 13G/A EDGAR
- Jul 17, 20264 EDGAR
- Jul 14, 2026SCHEDULE 13G/A EDGAR
- Jun 17, 20264 EDGAR
- Jun 16, 20264 EDGAR
- Jun 4, 20264 EDGAR
- Jun 3, 20264 EDGAR
- Jun 3, 2026144 EDGAR
- Jun 2, 2026144 EDGAR
- May 28, 20264 EDGAR
- May 27, 2026144 EDGAR
- May 27, 2026SD EDGAR
- May 26, 20264 EDGAR
- May 22, 20264 EDGAR
- May 22, 2026144 EDGAR
- May 22, 2026144 EDGAR
The 455 filings since October 2021 can be filtered by form type and year here when JavaScript is on.
Every filing from the last five years, summarized. The full record is on SEC EDGAR.
Insider trades
111 open-market trades by officers, directors and large owners since October 2021: 3 buys and 108 sales. Grants, option exercises and gifts are left out.
| Date | Who | Trade | Shares | Price | Value | Filing |
|---|---|---|---|---|---|---|
| Jun 3, 2026 | Sayiner NecipDirector | Sale | 1,586 | $157.44 | $249.7K | Form 4 |
| Jun 2, 2026 | Mahoney Robert JohnEVP Global Operations | Sale | 1,155 | $155.24 | $179.3K | Form 4 |
| May 27, 2026 | Sutton ToddVP Corporate Controller | Sale | 2,000 | $159.99 | $320.0K | Form 4 |
| May 22, 2026 | Evans EileenEVP, General Counsel and Sec'y | Sale | 926 | $155.51 | $144.0K | Form 4 |
| May 22, 2026 | St Dennis ThomasDirector | Sale | 900 | $155.37 | $139.8K | Form 4 |
| May 21, 2026 | Blumenstock Gerald MEVP, Research, Dev. & Eng. | Sale | 1,161 | $152.70 | $177.3K | Form 4 |
| May 20, 2026 | Tatnall ChristopherEVP Global Customer Operations | Sale | 1,166 | $149.75 | $174.6K | Form 4 |
| May 19, 2026 | Quirk JeanneDirector | Sale | 1,789 | $140.22 | $250.9K | Form 4 |
| May 19, 2026 | GRAVES GREGORY BDirector | Sale | 3,225 | $141.61 | $456.7K | Form 4 |
| May 19, 2026 | KURTZWEIL JOHN TDirector | Sale | 3,500 | $138.79 | $485.8K | Form 4 |
| May 14, 2026 | Sutton ToddVP Corporate Controller | Sale | 2,574 | $163.89 | $421.9K | Form 4 |
| May 14, 2026 | Blumenstock Gerald MEVP, Research, Dev. & Eng. | Sale | 1,015 | $162.32 | $164.8K | Form 4 |
| May 13, 2026 | Redinbo GregEVP and Chief Strategy Officer | Sale | 2,883 | $160.85 | $463.7K | Form 4 |
| May 13, 2026 | Titinger JorgeDirector | Sale | 2,000 | $164.14 | $328.3K | Form 4 |
| May 12, 2026 | Mahoney Robert JohnEVP Global Operations | Sale | 2,258 | $161.00 | $363.5K | Form 4 |
| May 6, 2026 | Low RussellPRESIDENT AND CEO | Sale | 7,468 | $156.75 | $1.2M | Form 4 |
| May 1, 2026 | Low RussellPRESIDENT AND CEO | Sale | 1,244 | $138.86 | $172.7K | Form 4 |
| Apr 1, 2026 | Low RussellPRESIDENT AND CEO | Sale | 1,244 | $94.06 | $117.0K | Form 4 |
| Mar 24, 2026 | Low RussellPRESIDENT AND CEO | Sale | 1,244 | $90.00 | $112.0K | Form 4 |
| Feb 20, 2026 | Titinger JorgeDirector | Sale | 1,000 | $80.00 | $80.0K | Form 4 |
All 111 trades can be filtered by person here when JavaScript is on.
From Forms 4 filed with the SEC.
Major holders
Investors who own more than 5% of the shares must tell the SEC: a 13D if they may seek to influence the company, a 13G if they hold passively.
- FMR LLCSCHEDULE 13G/A, 3 filings May 6, 2026 to Aug 6, 202678
- REINHART PARTNERS, LLC.SCHEDULE 13G/A, 2 filings Feb 12, 2026 to Jul 14, 202679
- VANGUARD CAPITAL MANAGEMENT LLCSCHEDULE 13G, 1 filing Apr 29, 202680
- VANGUARD PORTFOLIO MANAGEMENT LLCSCHEDULE 13G, 1 filing Apr 28, 202681
- VANGUARD GROUP INCSCHEDULE 13G/A, 6 filings Feb 9, 2022 to Mar 26, 202682
- AMERICAN CENTURY INVESTMENT MANAGEMENT INCSCHEDULE 13G/A, 2 filings Aug 14, 2025 to Nov 14, 202583
- BlackRockSCHEDULE 13G/A, 7 filings Jan 28, 2022 to Apr 29, 202584
- Senvest Management, LLCSC 13G/A, 4 filings Feb 9, 2022 to Feb 9, 202485
- PRIMECAP MANAGEMENT CO/CA/SC 13G/A, 2 filings Feb 10, 2022 to Oct 7, 202286
- DIMENSIONAL FUND ADVISORS LPSC 13G/A, 1 filing Feb 8, 202287
Executive pay
What the company paid its top executives, from the summary compensation table in its proxy statement. Total pay includes salary, bonus, stock and option awards and other pay, as the company valued them.
| Year | Executive | Age | Salary | Total pay |
|---|---|---|---|---|
| 2025 | Russell J. LowPresident and Chief Executive Officer | $608.7K | $5.1M88 | |
| 2025 | James G. CooganExecutive Vice President and Chief Financial Officer | $466.3K | $2.4M88 | |
| 2025 | Eileen J. EvansExecutive Vice President, HR and Legal, and General Counsel | $384.6K | $1.6M88 | |
| 2025 | Christopher J. TatnallExecutive Vice President, Global Customer Operations | $312.5K | $1.3M88 | |
| 2025 | Gerald M. BlumenstockExecutive Vice President, Research, Development, and Engineering | $312.5K | $1.3M88 | |
| 2025 | Gregory F. RedinboExecutive Vice President, Marketing and Applications | $312.5K | $1.3M88 | |
| 2024 | Russell J. LowPresident and Chief Executive Officer | $633.0K | $4.3M88 | |
| 2024 | James G. CooganExecutive Vice President and Chief Financial Officer | $485.0K | $1.8M88 | |
| 2024 | Christopher J. TatnallExecutive Vice President, Global Customer Operations | $325.0K | $1.1M88 | |
| 2024 | Gerald M. BlumenstockExecutive Vice President, Research, Development, and Engineering | $325.0K | $1.1M88 | |
| 2024 | Gregory F. RedinboExecutive Vice President, Marketing and Applications | $325.0K | $1.1M88 | |
| 2024 | Eileen J. EvansExecutive Vice President, HR and Legal, and General Counsel | $18.5K | $883.4K88 | |
| 2023 | Russell J. LowPresident and Chief Executive Officer | $633.0K | $4.2M88 | |
| 2023 | James G. CooganExecutive Vice President and Chief Financial Officer | $123.1K | $1.3M88 | |
| 2023 | Gerald M. BlumenstockExecutive Vice President, Research, Development, and Engineering | $181.2K | $1.2M88 | |
| 2023 | Gregory F. RedinboExecutive Vice President, Marketing and Applications | $310.0K | $1.1M88 | |
| 2023 | Christopher J. TatnallExecutive Vice President, Global Customer Operations | $310.8K | $898.0K88 |
Held by these funds
The largest holders among investment managers' 13F reports for the quarter ending Jun 30, 2026, the top 25 of 100. Change is in shares since the quarter before.
| Fund | Shares | Value | Share of the fund | Change |
|---|---|---|---|---|
| BlackRock, Inc. | 5,029,462 | $952.8M | 0.0% | +92,688 |
| Fmr LLC | 4,125,902 | $781.7M | 0.0% | +1,694,781 |
| Vanguard Portfolio Management LLC | 2,478,878 | $469.6M | 0.0% | −9,415 |
| Vanguard Capital Management LLC | 1,386,518 | $262.7M | 0.0% | +3,748 |
| State Street Corp | 1,231,109 | $233.2M | 0.0% | +42,064 |
| Victory Capital Management Inc | 1,134,007 | $214.8M | 0.1% | −144,998 |
| Reinhart Partners, Llc. | 928,660 | $175.9M | 4.0% | −729,085 |
| Geode Capital Management, LLC | 833,607 | $158.0M | 0.0% | +22,343 |
| BNP PARIBAS ASSET MANAGEMENT Holding S.A. | 803,151 | $152.2M | 0.2% | −202,877 |
| Dimensional Fund Advisors LP | 709,266 | $134.3M | 0.0% | −134,831 |
| Balyasny Asset Management L.P. | 616,196 | $116.7M | 0.2% | −748,344 |
| Primecap Management Co/ca/ | 610,451 | $115.6M | 0.1% | −48,201 |
| Invesco Ltd. | 527,724 | $100.0M | 0.0% | +362,649 |
| Charles Schwab Investment Management Inc | 416,230 | $78.9M | 0.0% | −29,539 |
| Barrow Hanley Mewhinney & Strauss LLC | 392,240 | $74.3M | 0.2% | +392,183 |
| Manufacturers Life Insurance Company, The | 383,760 | $72.7M | 0.1% | −107,985 |
| Northern Trust Corp | 382,027 | $72.4M | 0.0% | −34,676 |
| American Century Companies Inc | 369,879 | $70.1M | 0.0% | −582,035 |
| Morgan Stanley | 366,077 | $69.4M | 0.0% | −215,559 |
| Boston Trust Walden Corp | 359,256 | $68.1M | 0.5% | −19,269 |
| Emerald Advisers, LLC | 330,469 | $62.6M | 1.5% | +234,231 |
| UBS Group AG | 320,891 | $60.8M | 0.0% | −56,346 |
| Boston Partners | 303,929 | $55.7M | 0.0% | −36,346 |
| Goldman Sachs Group Inc | 235,253 | $44.6M | 0.0% | −262,371 |
| Vanguard Fiduciary Trust Co | 220,809 | $41.8M | 0.0% | +20,344 |
13F reports cover disclosed long positions in U.S. stocks only.
SEC filer profile
How Axcelis Technologies is registered with the Securities and Exchange Commission, from its EDGAR record and the cover page of its latest annual report.
- Name on EDGARAXCELIS TECHNOLOGIES INC2
- CIK0001113232
- Employer ID (EIN)34-181859617
- Filer statusLarge accelerated filer not an emerging growth company; not a smaller reporting company; not a shell company17
- Incorporated inDelaware17
- Fiscal year endsDecember 312
- Industry code (SIC)3559 Special Industry Machinery, NEC2
- SEC reviewing officeOffice of Technology, Division of Corporation Finance2
- Business address108 Cherry Hill Drive, Beverly, MA 019152
- Phone978-787-40002
- Shares outstanding30,881,489 as of Aug 3, 202615
- Public float$2.2B as of Jun 30, 202517
- AuditorErnst & Young LLP, Boston, Massachusetts PCAOB ID 42; it also attests to the company’s internal control over financial reporting17
- On EDGAR sinceMay 5, 20002
- Filings1,621 in all: 4 (857), 8-K (185), SC 13G/A (96), 10-Q (79), 144 (64), 3 (38), 4/A (38), SC 13G (35)2
All 45 form types
DEF 14A (26), 10-K (25), ARS (18), UPLOAD (14), SD (13), S-8 (12), SC 13D/A (12), 5 (11), 10-K/A (10), CORRESP (10), DEFA14A (9), 425 (7), SCHEDULE 13G/A (7), EFFECT (6), 424B3 (5), PRE 14A (5), SCHEDULE 13G (5), S-1/A (4), S-3 (4), 3/A (3), 10-Q/A (2), 5/A (2), 8-K/A (2), POS AM (2), S-3ASR (2), SC 13D (2), 10-K405 (1), 15-12G (1), 424B4 (1), 8-A12G (1), DFAN14A (1), NT 10-K (1), S-1 (1), S-3/A (1), S-4 (1), S-4/A (1), S-8 POS (1)
- Latest filingsAnnual report (10-K) Feb 26, 2026
Quarterly report (10-Q) Aug 6, 2026
Proxy statement (DEF 14A) Mar 31, 2026
Latest 8-K (8-K) Aug 6, 2026
Securities registered for trading
| Class | Symbol | Exchange |
|---|---|---|
| Common Stock, $.001 par value | ACLS | Nasdaq Global Select Market |
From the cover page of the 10-K filed Feb 26, 2026 (Section 12(b) of the Exchange Act).17
Risk factors and legal proceedings
The risks Axcelis Technologies names in Item 1A of its 10-K filed Feb 26, 2026: 34 risks under these headings, as written.17
- Risks Related to Our Business and Industry
- If semiconductor chip manufacturers do not make sufficient capital expenditures, our sales and profitability will be harmed.
- If we fail to develop and introduce reliable new or enhanced products and services that meet the needs of semiconductor chip manufacturers, our results will suffer.
- Axcelis is subject to the risks of operating internationally: we derive a substantial portion of our revenue from outside the United States, especially from Asia.
- The impact of tariffs on our business is difficult to predict, and may change substantially and without notice.
- Our dependence upon suppliers for many components and sub-assemblies could result in increased costs or delays in the manufacture and sale of our products.
- A significant portion of our revenue depends on customers electing to buy aftermarket products and services from Axcelis.
- If we fail to compete successfully in the highly competitive semiconductor capital equipment industry, our sales and profitability will decline.
- We are dependent on sales to a limited number of large customers; the loss of a significant customer or any reduction in orders from them could materially affect our sales.
- Our international operations involve currency risk.
- We may not be able to maintain and expand our business if we are not able to hire, retain and integrate qualified personnel.
- Our financial results may fluctuate significantly.
The other 23 risks
- Our financial results may fall short of anticipated levels because forecasting revenue and profitability is complex and may be inaccurate.
- The semiconductor equipment industry is cyclical, and we expect that demand for our products will increase and decrease, making it difficult to manage the business and potentially causing harm to our sales and profitability.
- Axcelis is exposed to risks related to cybersecurity threats and incidents.
- Axcelis is subject to risks associated with compliance with environmental, health and safety regulations.
- Our financial condition and results of operations could be adversely affected by global pandemics.
- Our proprietary technology may be vulnerable to efforts by competitors to challenge or design around, potentially reducing our market share.
- We (or customers that we indemnify) might face intellectual property infringement claims or patent disputes that may be costly to resolve and, if resolved against us, could be very costly to us and prevent us from making and selling our systems.
- If operations were to be disrupted at Axcelis’ manufacturing facilities, it would have a negative impact on our business.
- If we do not have access to capital on favorable terms, on the timeline we anticipate, or at all, our financial condition and results of operations could be materially adversely affected.
- The market price of our common stock may be volatile, which could result in substantial losses for investors.
- We operate in jurisdictions with complex and changing tax laws.
- Risks Related to the Merger
- The exchange ratio is fixed and will not be adjusted in the event of any change in either Axcelis’ or Veeco’s stock price.
- The Merger may be delayed or may not be completed and the Merger Agreement may be terminated in accordance with its terms, which could materially and adversely effect Axcelis and/or Veeco.
- The market price for shares of common stock of the combined company following the completion of the merger may be affected by factors different from, or in addition to, those that historically have affected or currently affect the market prices of shares of Axcelis common stock and Veeco common stock.
- Regulatory approvals may not be received, may take longer than expected or may impose conditions that are not presently anticipated or that cannot be met.
- Axcelis stockholders and Veeco stockholders will each have reduced ownership and voting interest in the combined company as compared to ownership and voting interest in each of Axcelis and Veeco on a standalone basis.
- The Merger Agreement may prevent Axcelis and Veeco from entering into certain transactions and taking certain actions that might otherwise be beneficial to Axcelis or Veeco and their respective stockholders
- Litigation against Axcelis and Veeco could prevent or delay the completion of the Merger or result in the payment of damages following completion of the Merger.
- Failure to attract, motivate and retain executives and other key employees could diminish the anticipated benefits of the Merger.
- Whether or not the Merger is completed, the announcement and pendency of the Merger will divert significant management resources to complete the Merger, which could have a material adverse effect on Axcelis’ and Veeco’s respective businesses, financial results, and/or market prices.
- The market price of the combined company’s common stock may be volatile, and holders of the combined company’s common stock could lose a significant portion of their investment due to decreases in the market price of the combined company’s common stock following completion of the Merger.
- Each of Axcelis and Veeco will incur significant transaction, merger-related and restructuring costs in connection with the Merger.
- Axcelis stockholders and Veeco stockholders will not be entitled to appraisal rights in the Merger.
Legal proceedings
We are not presently a party to any litigation that we believe might have a material adverse effect on our business operations. We are, from time to time, a party to litigation that arises in the normal course of our business operations.
The opening of Item 3, Legal Proceedings.17
Links
- Websitewww.axcelis.com1
- WikipediaAxcelis Technologies
- WikidataQ4830196
- SEC EDGARCIK 1113232
Sources
The numbers on this page point here. Each one links to the record it came from.
- 1WikidataAxcelis Technologies on Wikidata
- 2
- 3WikipediaAxcelis Technologies on Wikipedia
- 4
- 5Wikimedia CommonsAxcelis Technologies logo by Axcelis Technologies, Public domain
- 6
- 7
- 8Wikimedia CommonsAxcelis Technologies photo by John Phelan, CC BY-SA 4.0
- 9
- 10
- 11
- 12
- 13
- 14
- 15
- 16
- 17
- 18SEC EDGARRussell Low, Chief executive officer
- 19
- 20
- 21
- 22
- 23SEC EDGARJay Zager, Chief financial officer
- 24
- 25SEC EDGARTodd Sutton, VP Corporate Controller
- 26
- 27
- 28
- 29
- 30SEC EDGARRussell Low, EVP, Engineering
- 31
- 32
- 33
- 34
- 35
- 36
- 37
- 38
- 39
- 40
- 41SEC EDGARGregory B. Graves, Board member
- 42SEC EDGARNecip Sayiner, Board member
- 43SEC EDGARDipti Vachani, Board member
- 44SEC EDGARJeanne Quirk, Board member
- 45SEC EDGARJorge Titinger, Board member
- 46SEC EDGARTzu Yin Chiu, Board member
- 47SEC EDGARMary G. Puma, Board member
- 48SEC EDGARDennis Thomas St, Board member
- 49SEC EDGARJohn T. Kurtzweil, Board member
- 50SEC EDGARRichard J. Faubert, Board member
- 51SEC EDGARArthur L. George Jr., Board member
- 52SEC EDGARBarbara J. Lundberg, Board member
- 53SEC EDGAREdward H. Braun, Board member
- 54SEC EDGARJoseph P. Keithley, Board member
- 55SEC EDGARKirk P. Pond, Board member
- 56SEC EDGARMichio Naruto, Board member
- 57SEC EDGARPatrick H. Nettles, Board member
- 58SEC EDGARR. John Fletcher, Board member
- 59SEC EDGARStephen R. Hardis, Board member
- 60SEC EDGARWilliam C. Jennings, Board member
- 61SEC EDGAREileen Evans, General counsel
- 62SEC EDGARResults of operations
- 63SEC EDGARResults of operations
- 64SEC EDGARShareholder vote
- 65
- 66SEC EDGARResults of operations
- 67
- 68SEC EDGAROther events
- 69SEC EDGAROther events
- 70SEC EDGARResults of operations
- 71
- 72SEC EDGARRegulation FD disclosure
- 73SEC EDGARResults of operations
- 74NasdaqNasdaq calendar
- 75
- 76
- 77
- 78
- 79
- 80
- 81
- 82
- 83
- 84
- 85
- 86
- 87
- 88