Private company
Carl Zeiss SMT
Logo: Carl Zeiss, Public domain, via Wikimedia Commons4
Semiconductor company
Carl Zeiss SMT GmbH comprises the Semiconductor Manufacturing Technology business group of ZEISS and develops and produces equipment for the manufacture of microchips. The company is majority owned by Carl Zeiss AG, with a 24.9% minority stake by ASML Holding.2 Wikipedia text CC BY-SA 4.0
Last updated Oct 21, 2026.
Overview
- Industrysemiconductor industry1
- HeadquartersOberkochen1
- Websitewww.zeiss.com/smt
- Legal formGesellschaft mit beschränkter Haftung1
- LEI529900DAXFMKONEX82603
- StatusActive3
- LEI statusIssued and current3
- Registered addressRudolf-Eber-Straße 2, 73447 Oberkochen, Germany3
- Registered withLocal Court Ulm, HRB 7256673
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Carl Zeiss SMT GmbH comprises the Semiconductor Manufacturing Technology business group of ZEISS and develops and produces equipment for the manufacture of microchips. The company is majority owned by Carl Zeiss AG, with a 24.9% minority stake by ASML Holding.2
Corporate structure
Carl Zeiss SMT is part of a group headed by Carl Zeiss AG. 57 entities, 27 countries on record. Switch between the flow chart and the network, and select any entity to see its details.
- Carl Zeiss AG Oberkochen, Germany
- Carl Zeiss Meditec 65% · Jena, Germany
- Carl Zeiss Meditec, Inc. Subsidiary · Dublin, California, United States
- HYALTECH LTD. Subsidiary · Livingston, United Kingdom
- カールツァイスメディテック株式会社 Subsidiary · 東京都, Japan
- Carl Zeiss Jena GmbH Jena, Germany
- Carl Zeiss Microscopy Jena, Germany
- Carl Zeiss SMT Oberkochen, Germany
- Carl Zeiss Vision Aalen, Germany
- American Optical Subsidiary · Southbridge
- Carl Zeiss (Australia) Subsidiary · Sydney, Australia
- Carl Zeiss (Israel) Subsidiary
- Carl Zeiss (United Kingdom) Subsidiary · Cambridge, United Kingdom
- Contax Subsidiary
- Hensoldt product Subsidiary · Wetzlar, Germany
- Zeiss Ikon Subsidiary · Stuttgart, Germany
- High-Tech Gründerfonds Stake · 0.37% · Bonn
- brisath kharl sis s cakad (บริษัท คาร์ล ไซส์ส จำกัด) Subsidiary · Bangkok, Thailand
- cai si gong ye ce liang ji shu (shang hai) you xian gong si (蔡司工业测量技术（上海）有限公司) Subsidiary · Shanghai, China
- CARL ZEISS Subsidiary · Randburg, South Africa
- CARL ZEISS Subsidiary · Leuven, Belgium
- CARL ZEISS (N.Z.) LIMITED Subsidiary · Auckland, New Zealand
- Carl Zeiss (Russia & CIS) Subsidiary
- Carl Zeiss AG Subsidiary · Feldbach, Switzerland
- Carl Zeiss B.V. Subsidiary · Breda, Netherlands
- Carl Zeiss Beteiligungs-GmbH Subsidiary · Oberkochen, Germany
- CARL ZEISS CANADA LIMITED Subsidiary · Toronto, Ontario, Canada
- Carl Zeiss de Mexico, S.A. de C.V. Subsidiary · Mexico, D. F., Mexico
- CARL ZEISS FAR EAST COMPANY LIMITED Subsidiary · Kwai Fong, Hong Kong
- and 29 more
- Carl Zeiss Meditec 65% · Jena, Germany
Built from parent and subsidiary links from GLEIF, the Global Legal Entity Identifier Foundation (CC0); subsidiaries, stakes and holdings from Wikidata (CC0). Each entity in the chart links to its source.
Subsidiaries and ownership
Owners
- ASML Holding 24.9% since Nov 2016
- Carl Zeiss AG
From Wikidata.1
Timeline
Links
- Websitewww.zeiss.com/smt1
- WikipediaCarl Zeiss SMT
- WikidataQ15108623
Sources
The numbers on this page point here. Each one links to the record it came from.
- 1WikidataCarl Zeiss SMT on Wikidata
- 2WikipediaCarl Zeiss SMT on Wikipedia
- 3
- 4Wikimedia CommonsCarl Zeiss SMT logo by Carl Zeiss, Public domain